Jeol JSM-6400

Model: Jeol JSM-6400

Functionality: Fully operational

However EDX analyzer (illustrated in photos) is non-functioning 

Specifications

High-Vacuum SEM

Beam voltage 0.2 kV-40kV; 

Beam current 10 picoamps-10 microamps

Resolution 10 nm attainable; 

Magnification ×10 to ×300 000

Electron source: tungsten hair pin filament

Specimen Stage: - Fully Eucentric goniometer stage

Tilt: -5 to 90°

Rotation: 360° endless

Detectors

Secondary electron detector, consisting of scintillator/photomultiplier, 

Backscattered electron detector (Si pn-junction, divided annular type)

Date of First Installation: 

15-02-1992

Sample Chamber: 

1 unit, 

10 l volume, 

Vacuum Operations

5 min pump-down time for sample chamber 

2 minutes for electron gun

1 minute for specimen exchange chamber

Software 

Jeol Semafore version 5.2 – Digital slow scan image recording system (on PC and CD)

Includes manual (hard-copy)

EOS – integrated in SEM

Included Ancillaries

Oil diffusion pump (new as of 2020)

PC: HP ProDesk PC, with Win7 (new as of ~2019) 

Instruction manual (hard-copy)

Pressure gauge for dry nitrogen (see below)

For Operation, Requires:

Supply of dry nitrogen gas: 0.4 to 0.5 MPa 

ISO 7/1 Rc 1/4 coupling.

Cooling Unit 

Providing a supply of 5 liters/min or higher of water at 0.08 to 0.25 MPa (gauge pressure), kept at 20 ±5 °C.